EBARA Corporation has grown to become the top manufacturer of industrial machinery after founded as a pump manufacturer in 1912. EBARA has abundant “core technology” such as hard technology, purification, incineration and heat recovery process know-how cultivated over many years We continue to challenge the development of a new environmental conservation system that responds to the demands of the times on a base.
● span> Dry vacuum pump
● span> Screw type dry pump
● span> Magnetically levitated turbo molecular pump (ET)
● span> Cryo turbo pump
● span> Exhaust gas treatment equipment for semiconductors
● span> Nonparticle pump for ultra pure water / chemical liquid
● span> High pressure pure jet pump for wafer cleaning
● span> Chemicals for water treatment
PFC abatement requiring no supply / distribution
Thorough compact, lightweight, achieving the world’s most energy-saving performance in the class, contributing to the reduction of power consumption at semiconductor manufacturing plants.