We are aiming for total service and total solution of power supply related products for plasma through provision of highly reliable power supply for plasma and impedance matching device (Visual Matching Box) and measuring / monitoring device.
In addition, new products that succeeded in greatly miniaturizing have also received high praise.

● High frequency power supply for plasma
● Visual Matching Box
● RF power supply measurement RF power tracer
● Chamber Analyzer

Is there anything you need?
· RF / G, M / B production discontinued, repair canceled
· RF system trouble
We will contribute to improving RF system troubles by replacing products of other companies.

 

Visual matching box

 

· Real-time visual measuring instruments convenient for equipment maintenance and development
· Matcher is usually in automatic matching operation even if you do not connect the monitor
· Graph display of traveling wave power, reflected wave power etc. on the trace screen
· Chamber impedance monitoring on the Smith chart (with alarm function)